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Grazing incidence small-angle X-ray scattering and diffraction study of the resistance of Mo implanted Si wafer after annealing |
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Titel: |
Grazing incidence small-angle X-ray scattering and diffraction study of the resistance of Mo implanted Si wafer after annealing |
Auteur: |
Lee, Chih-Hao Qiu, Chui-Zhang Yu, Kuan-Li Liang, Jenq-Horng Tsai, Chun-Tse Lin, Ming-Zhe |
Verschenen in: |
Journal of applied crystallography |
Paginering: |
Jaargang 36 (2003) nr. 3-1 pagina's 612-616 |
Jaar: |
2003-06-01 |
Inhoud: |
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Uitgever: |
International Union of Crystallography, 5 Abbey Square, Chester, Cheshire CH1 2HU, England |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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