|
A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement |
|
|
|
Titel: |
A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement |
Auteur: |
Gao, Wendi Tian, Bian Liu, Cunlang Mi, Yingbiao Jia, Chen Zhao, Libo Liu, Tao Zhu, Nan Yang, Ping Lin, Qijing Jiang, Zhuangde Sun, Dong |
Verschenen in: |
Frontiers of mechanical engineering |
Paginering: |
Jaargang 18 () nr. 2 pagina's xx |
Jaar: |
2023-07-14 |
Inhoud: |
|
Uitgever: |
Higher Education Press, Beijing |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|