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Time of flight improved thermally grown oxide thickness measurement with terahertz spectroscopy |
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Titel: |
Time of flight improved thermally grown oxide thickness measurement with terahertz spectroscopy |
Auteur: |
Zhang, Zhenghao Huang, Yi Zhong, Shuncong Lin, Tingling Zhong, Yujie Zeng, Qiuming Nsengiyumva, Walter Yu, Yingjie Peng, Zhike |
Verschenen in: |
Frontiers of mechanical engineering |
Paginering: |
Jaargang 17 () nr. 4 pagina's xx |
Jaar: |
2022-11-04 |
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Uitgever: |
Higher Education Press, Beijing |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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