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Journal description
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Details for article 17 of 20 found articles
| Title: |
Synthesis and Characterization of Porogen Based Porous Low-k Thin Films |
| Author: |
Pawar, Namrata B. Mhaisagar, Yogesh S. Gaikwad, Anil S. Mahajan, Ashok M. |
| Appeared in: |
SILICON |
| Paging: | Volume 9 (2016) nr. 3 pages 439-446 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 20 found articles
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