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Details for article 12 of 38 found articles
| Title: |
Formation of Globally Uniaxial Strain in He+ Implanted Silicon-on-Insulator Wafers Based on the Size Effect of Internal Stress of Strip SiN Films |
| Author: |
Xu, Hao Jing, Yibo Miao, Dongming Guo, Yiwei Han, Jia Wang, Lin Song, Jianjun Dai, Xianying |
| Appeared in: |
SILICON |
| Paging: | Volume 16 () nr. 4 pages 1501-1508 |
| Year: |
2023-11-23 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 38 found articles
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