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Details for article 19 of 30 found articles
| Title: |
Finite Element Simulation of Stress Distribution and Strain Model Optimization for Strain-Inducing SOI Wafers with Highly Stressed SiN Films |
| Author: |
Jing, Yibo Xu, Hao Miao, Dongming Guo, Yiwei Han, Jia Wang, Lin Song, Jianjun Dai, Xianying |
| Appeared in: |
SILICON |
| Paging: | Volume 16 () nr. 11 pages 4659-4672 |
| Year: |
2024-05-30 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 30 found articles
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