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                                       Details for article 32 of 34 found articles
 
 
  Thermal decomposition pathways of chlorinated trisilanes
 
 
Title: Thermal decomposition pathways of chlorinated trisilanes
Author: Yu, Neung-Kyung
Kim, Kyungjun
Heo, Changhoon
Lee, Jinhee
Kim, Wonyeob
Chung, Sung-Woong
Shong, Bonggeun
Appeared in: SILICON
Paging: Volume 15 () nr. 7 pages 3193-3199
Year: 2022-12-05
Contents:
Publisher: Springer Netherlands, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 32 of 34 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands