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Journal description
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Details for article 13 of 34 found articles
| Title: |
Effect of SF6 Plasma Etching on the Optical, Morphological and Structural Properties of SiC Films |
| Author: |
de Almeida Maribondo Galvão, Nierlly Karinni Godoy Junior, Armstrong de Jesus Pereira, André Luis Martins, Gislene Valdete Pessoa, Rodrigo Sávio Maciel, Homero Santiago Fraga, Mariana Amorim |
| Appeared in: |
SILICON |
| Paging: | Volume 15 () nr. 18 pages 7745-7754 |
| Year: |
2023-08-10 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 34 found articles
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