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Details for article 21 of 35 found articles
| Title: |
Modeling and Control of SiNx Film Growth using the Kinetic Monte Carlo Method: Impact of Gas Flow Rate on Surface Roughness and Film Thickness |
| Author: |
Bouhadiche, Adil Difellah, Zineddine Bouridah, Hachemi Remmouche, Riad Benghorieb, Soulef Beghoul, Mahmoud Riad Benzeghda, Sabah |
| Appeared in: |
SILICON |
| Paging: | Volume 15 () nr. 12 pages 5209-5220 |
| Year: |
2023-03-27 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 35 found articles
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