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Journal description
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Details for article 18 of 81 found articles
| Title: |
Design and Simulation of Vertical Bi-Directional Fringe Field Tuning of New Improved MEMS Accelerometer Using SOI Technology for Stress Compensation |
| Author: |
Dounkal, Manoj Kumar Bhan, R. K. Kumar, Navin |
| Appeared in: |
SILICON |
| Paging: | Volume 14 () nr. 17 pages 11587-11603 |
| Year: |
2022-04-15 |
| Contents: | |
| Publisher: |
Springer Netherlands, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 18 of 81 found articles
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