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                                       Details for article 19 of 35 found articles
 
 
  Improvement in Sensing Characteristics of Silicon Microstructure based MEMS Capacitive Sensor for Automotive Applications
 
 
Title: Improvement in Sensing Characteristics of Silicon Microstructure based MEMS Capacitive Sensor for Automotive Applications
Author: Suman, Shreya
Punetha, Deepak
Pandey, Saurabh Kumar
Appeared in: SILICON
Paging: Volume 13 () nr. 5 pages 1475-1483
Year: 2020-06-10
Contents:
Publisher: Springer Netherlands, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 19 of 35 found articles
 
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