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Ultra-Thin Silicon Wafers Fabrication and Inverted Pyramid Texturing Based on Cu-Catalyzed Chemical Etching |
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Title: |
Ultra-Thin Silicon Wafers Fabrication and Inverted Pyramid Texturing Based on Cu-Catalyzed Chemical Etching |
Author: |
Omer, Altyeb Ali Abaker He, Zudong Hong, Shihao Chang, Yuanchih Yu, Jie Li, Shaoyuan Ma, Wenhui Liu, Wen El Kolaly, Wael Chen, Ran |
Appeared in: |
SILICON |
Paging: |
Volume 13 () nr. 2 pages 351-359 |
Year: |
2020-03-10 |
Contents: |
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Publisher: |
Springer Netherlands, Dordrecht |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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