|
| next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 1 of 7 found articles
| Title: |
Analysis of amorphous-silicon deposition conditions in plasma-silane mixtures at low pressure |
| Author: |
Petrov, S. V. Prokopiev, E. P. Sokolov, E. M. |
| Appeared in: |
Il nuovo cimento. D |
| Paging: | Volume 19 (1997) nr. 6 pages 817-826 |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Società Italiana di Fisica, Bologna |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 7 found articles
| next >> |