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                                       Details for article 13 of 16 found articles
 
 
  Optimization of Pupil Fit Parameters for Contact Hole Pattern CD Difference Improvement
 
 
Title: Optimization of Pupil Fit Parameters for Contact Hole Pattern CD Difference Improvement
Author: Lee, Heehong
Rah, Hyungju
Lee, Hyosung
Sohn, Jaewoong
Choi, Byoungdeog
Appeared in: International journal of precision engineering and manufacturing
Paging: Volume 25 () nr. 4 pages 731-738
Year: 2024-02-09
Contents:
Publisher: Korean Society for Precision Engineering, Seoul
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 16 found articles
 
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