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Journal description
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Details for article 10 of 19 found articles
| Title: |
Development of Gaussian Window Function for Precision Topography of Silicon-Wafer Surface Using Wavelength-Modulation Interferometry |
| Author: |
Bae, Juncheol Kim, Yangjin Ito, Yusuke Sugita, Naohiko |
| Appeared in: |
International journal of precision engineering and manufacturing |
| Paging: | Volume 25 () nr. 12 pages 2549-2561 |
| Year: |
2024-09-27 |
| Contents: | |
| Publisher: |
Korean Society for Precision Engineering, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 19 found articles
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