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                                       Details for article 15 of 15 found articles
 
 
  X-ray Diffraction Analysis of Damaged Layer During Polishing of Silicon Carbide
 
 
Title: X-ray Diffraction Analysis of Damaged Layer During Polishing of Silicon Carbide
Author: Jung, Hokyoung
Jeong, Seonho
Park, Youngwook
Shin, Yeongil
Jeong, Haedo
Appeared in: International journal of precision engineering and manufacturing
Paging: Volume 24 () nr. 1 pages 25-32
Year: 2022-11-02
Contents:
Publisher: Korean Society for Precision Engineering, Seoul
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15 of 15 found articles
 
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