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Journal description
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Details for article 1 of 21 found articles
| Title: |
Accurate measurement of atomic chlorine radical density in process plasma with spatially resolvable optical emission spectrometer |
| Author: |
Oh, Changhoon Kang, Minwook Hahn, Jae Won |
| Appeared in: |
International journal of precision engineering and manufacturing |
| Paging: | Volume 16 (2015) nr. 9 pages 1919-1924 |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Korean Society for Precision Engineering, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 21 found articles
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