|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 11 of 17 found articles
| Title: |
Effect of non-spherical colloidal silica particles on removal rate in oxide CMP |
| Author: |
Lee, Hojun Kim, Moonsung Jeong, Haedo |
| Appeared in: |
International journal of precision engineering and manufacturing |
| Paging: | Volume 16 (2015) nr. 13 pages 2611-2616 |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Korean Society for Precision Engineering, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 17 found articles
| << previous | next >> |