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Journal description
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Details for article 12 of 28 found articles
| Title: |
Effects of chemical slurries on fixed abrasive chemical-mechanical polishing of optical silicon substrates |
| Author: |
Tian, Yebing Zhong, Zhaowei Ng, Jun Hao |
| Appeared in: |
International journal of precision engineering and manufacturing |
| Paging: | Volume 14 (2013) nr. 8 pages 1447-1454 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Springer Berlin Heidelberg, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 28 found articles
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