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Journal description
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Details for article 28 of 30 found articles
| Title: |
Study of oxygen and carbon species on Si substrate during in-situ cleaning prior to high-quality epitaxial deposition |
| Author: |
Kim, Hyoun-woo Kim, Kwang-sik Lee, Jung-ho |
| Appeared in: |
Metals and materials international |
| Paging: | Volume 8 () nr. 2 pages 183-190 |
| Year: |
2009-01-15 |
| Contents: | |
| Publisher: |
The Korean Institute of Metals and Materials, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 30 found articles
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