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                                       Details for article 3 of 17 found articles
 
 
  Deposition and surface modification of SiOf films with low dielectric constant
 
 
Title: Deposition and surface modification of SiOf films with low dielectric constant
Author: Lee, Seoghyeong
Yoo, Jae-Yoon
Park, Jong-Wan
Appeared in: Metals and materials international
Paging: Volume 3 (1997) nr. 3 pages 183-187
Year: 1997
Contents:
Publisher: The Korean Institute of Metals and Materials, Seoul
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 3 of 17 found articles
 
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