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Measurement of adhesion and bonding strength studies in 3D interconnect structures using atomic force microscopy |
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Titel: |
Measurement of adhesion and bonding strength studies in 3D interconnect structures using atomic force microscopy |
Auteur: |
Choi, Eunmi Choi, Hee Soo Kim, Areum Lee, Seon Jea Cui, Yinhua Kwon, Soon hyeong Kim, Chang Hyun Hahn, Sang June Son, Hyungbin Pyo, Sung Gyu |
Verschenen in: |
Metals and materials international |
Paginering: |
Jaargang 19 (2013) nr. 6 pagina's 1339-1342 |
Jaar: |
2013 |
Inhoud: |
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Uitgever: |
Springer Netherlands, Dordrecht |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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