|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 17 of 26 found articles
| Title: |
Impurity-controlled Mo films as diffusion barriers for Cu metallization |
| Author: |
Gu, Gil Ho Park, Sung Min Park, Chan Gyung |
| Appeared in: |
Metals and materials international |
| Paging: | Volume 18 (2012) nr. 3 pages 517-520 |
| Year: |
2012 |
| Contents: | |
| Publisher: |
The Korean Institute of Metals and Materials, Springer |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 26 found articles
| << previous | next >> |