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Journal description
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Details for article 15 of 25 found articles
| Title: |
Growth of silicon nitride film by controlling plasma ion energy and duty ratio at room temperature |
| Author: |
Kim, Byungwhan Lee, Sujin |
| Appeared in: |
Metals and materials international |
| Paging: | Volume 16 (2010) nr. 4 pages 633-637 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
The Korean Institute of Metals and Materials, Springer |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 25 found articles
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