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                                       Details for article 13 of 24 found articles
 
 
  Precise analysis of H, C, N, and O as dominant impurities in Cu films: complementary use of SIMS and GDMS
 
 
Title: Precise analysis of H, C, N, and O as dominant impurities in Cu films: complementary use of SIMS and GDMS
Author: Lim, Jae-Won
Isshiki, Minoru
Appeared in: Metals and materials international
Paging: Volume 11 (2005) nr. 4 pages 273-278
Year: 2005
Contents:
Publisher: The Korean Institute of Metals and Materials, Seoul
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 24 found articles
 
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