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Journal description
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Details for article 6 of 22 found articles
| Title: |
Laser annealing of SiO2 film deposited by ICPECVD for fabrication of silicon based low loss waveguide |
| Author: |
Wang, Ya’nan Luo, Yi Sun, Changzheng Xiong, Bing Wang, Jian Hao, Zhibiao Han, Yanjun Wang, Lai Li, Hongtao |
| Appeared in: |
Frontiers of optoelectronics in China |
| Paging: | Volume 9 (2016) nr. 2 pages 323-329 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Higher Education Press, Beijing |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 22 found articles
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