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High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography |
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Titel: |
High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography |
Auteur: |
Yuan, Xiaowan Xiao, Daiqin Yao, Wei Zhang, Zhihao Yang, Lin Zhang, Liyuan Zeng, Yibo Liao, Jiaqi Luo, Shanxiong Li, Chonghao Chen, Hong Qu, Xiangmeng |
Verschenen in: |
Nano research |
Paginering: |
Jaargang 15 () nr. 6 pagina's 5687-5694 |
Jaar: |
2022-02-28 |
Inhoud: |
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Uitgever: |
Tsinghua University Press, Beijing |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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