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Journal description
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Details for article 24 of 52 found articles
| Title: |
Effect of spray nozzle position on pad temperature distribution and wafer non-uniformity |
| Author: |
Lee, Kihun Lee, Dasol Jeong, Seonho Lee, Donghwan Jeong, Haedo |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 33 () nr. 12 pages 5677-5682 |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 24 of 52 found articles
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