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                                       Details for article 46 of 52 found articles
 
 
  Sandglass-type product specification management method for supporting modular design of semiconductor manufacturing equipment
 
 
Title: Sandglass-type product specification management method for supporting modular design of semiconductor manufacturing equipment
Author: Cho, Daeseung
Han, Jeongho
Yang, Jeongsam
Appeared in: Journal of mechanical science and technology
Paging: Volume 30 (2016) nr. 5 pages 2243-2256
Year: 2016
Contents:
Publisher: Korean Society of Mechanical Engineers, Seoul
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 46 of 52 found articles
 
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