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Journal description
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Details for article 46 of 52 found articles
| Title: |
Sandglass-type product specification management method for supporting modular design of semiconductor manufacturing equipment |
| Author: |
Cho, Daeseung Han, Jeongho Yang, Jeongsam |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 30 (2016) nr. 5 pages 2243-2256 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 46 of 52 found articles
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