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Journal description
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Details for article 17 of 52 found articles
| Title: |
Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices |
| Author: |
Galindo-Mentle, M. López-Huerta, F. Palomino-Merino, R. Zúñiga-Islas, C. Calleja-Arriaga, W. Herrera-May, A. L. |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 29 (2015) nr. 4 pages 1673-1679 |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 52 found articles
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