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Journal description
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Details for article 49 of 55 found articles
| Title: |
The effects of a spray slurry nozzle on copper CMP for reduction in slurry consumption |
| Author: |
Lee, Dasol Lee, Hyunseop Jeong, Haedo |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 29 (2015) nr. 12 pages 5057-5062 |
| Year: |
2015 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 49 of 55 found articles
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