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                                       Details for article 23 of 28 found articles
 
 
  Sensitivity analysis of plating conditions on mechanical properties of thin film for MEMS applications
 
 
Title: Sensitivity analysis of plating conditions on mechanical properties of thin film for MEMS applications
Author: Woo, Yoonhwan
Kim, Sang-Hyun
Appeared in: Journal of mechanical science and technology
Paging: Volume 25 (2011) nr. 4 pages 1017-1022
Year: 2011
Contents:
Publisher: Korean Society of Mechanical Engineers, Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 23 of 28 found articles
 
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