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Journal description
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Details for article 31 of 52 found articles
| Title: |
Multi-layer alignment control of a large area nano-imprinting stage |
| Author: |
Yim, Hong Jae Lee, Yong Hoon Lee, Sung Hoon Jeong, Jay Il Lim, Si-Hyung |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 23 (2009) nr. 4 pages 1094-1097 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 52 found articles
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