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Journal description
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Details for article 12 of 23 found articles
| Title: |
Fabrication of suspended micro-structures using diffsuser lithography on negative photoresist |
| Author: |
No, Kee Young Kim, Gi Dae Kim, Gyu Man |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 22 (2008) nr. 9 pages 1765-1771 |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 23 found articles
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