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Journal description
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Details for article 4 of 53 found articles
| Title: |
A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system |
| Author: |
Jung, Hyun Soo Hong, Min-Sung Lee, Soo -Hun Park, June Ho Kang, Dongwoo Lee, Moon G. |
| Appeared in: |
Journal of mechanical science and technology |
| Paging: | Volume 21 (2007) nr. 10 pages 1491-1497 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Korean Society of Mechanical Engineers, Seoul |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 53 found articles
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