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Journal description
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Details for article 4 of 16 found articles
| Title: |
Formation and properties of ultrathin layers for fabrication of SOI MOS nanotransistor elements |
| Author: |
Rudakov, V. I. Bogoyavlenskaya, E. A. Denisenko, Yu. I. Ovcharov, V. V. Kurenya, A. L. Rudenko, K. V. Lukichev, V. F. Orlikovsky, A. A. Plis, N. I. |
| Appeared in: |
Nanotechnologies in Russia |
| Paging: | Volume 8 (2013) nr. 3-4 pages 255-261 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 16 found articles
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