Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
Titel:
Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
Auteur:
Dyuzhev, N. A. Gusev, E. E. Gryazneva, T. A. Dedkova, A. A. Dronova, D. A. Kireev, V. Yu. Kirilenko, E. P. Migunov, D. M. Novikov, D. V. Patyukov, N. N. Presnukhina, A. A. Bakun, A. D. Ermakov, D. S.