Design, fabrication, testing and packaging of a silicon micromachined radio frequency microelectromechanical series (RF MEMS) switch
Titel:
Design, fabrication, testing and packaging of a silicon micromachined radio frequency microelectromechanical series (RF MEMS) switch
Auteur:
GIRIDHAR, M S JAMBHALIKAR, ASHWINI JOHN, JIJU ISLAM, R BEHERA, ANANDA NAGENDRA, C L THACHIL, GEORGE SRIKANTH, M P SOMANI, SHAILESH DARUKESHA, B H M BOLLU, SRINIVASARAO