|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 6 of 11 found articles
| Title: |
Features of the Interaction of a Radio-Frequency Discharge of Freon R-23 (CHF3) with Gallium Arsenide and Silicon |
| Author: |
Dunaev, A. V. |
| Appeared in: |
Surface engineering and applied electrochemistry |
| Paging: | Volume 59 () nr. 1 pages 79-84 |
| Year: |
2023-04-04 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 11 found articles
| << previous | next >> |