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Details for article 12 of 32 found articles
| Title: |
Electron Microscopy and Electron Energy Loss Spectroscopy of Thin Titanium Nitride Films in the TiNx/La:HfO2(Hf0.5Zr0.5O2)/TiNx/SiO2 System |
| Author: |
Suvorova, E. I. Uvarov, O. V. Klimenko, A. A. Chizh, K. V. |
| Appeared in: |
Bulletin of the Russian Academy of Sciences. Physics |
| Paging: | Volume 87 () nr. 10 pages 1466-1472 |
| Year: |
2023-10-23 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 32 found articles
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