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Journal description
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Details for article 25 of 26 found articles
| Title: |
Studying the Elastic Stresses at the Edges of a Section of the SOI Heterostructure of a Micro-Electromechanical Pressure Transducer with an Isolated Tensoframe |
| Author: |
Sokolov, L. V. |
| Appeared in: |
Bulletin of the Russian Academy of Sciences. Physics |
| Paging: | Volume 83 () nr. 11 pages 1345-1348 |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 25 of 26 found articles
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