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Journal description
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Details for article 3 of 25 found articles
| Title: |
Automating the mode of the electron-probe control of templates for imprint lithography |
| Author: |
Kazmiruk, V. V. Savitskaya, T. N. |
| Appeared in: |
Bulletin of the Russian Academy of Sciences. Physics |
| Paging: | Volume 76 (2012) nr. 9 pages 965-969 |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Allerton Press, Inc., Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 25 found articles
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