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Details for article 31 of 34 found articles
| Title: |
Two-mirror projection objective of a nanolithographer at λ = 13.5 nm |
| Author: |
Zuev, S. Yu. Pestov, A. E. Salashchenko, N. N. Skryl, A. S. Stroulea, I. L. Suslov, L. A. Toropov, M. N. Chkhalo, N. I. |
| Appeared in: |
Bulletin of the Russian Academy of Sciences. Physics |
| Paging: | Volume 75 (2011) nr. 1 pages 57-60 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Allerton Press, Inc., Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 34 found articles
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