Particulars of studying the roughness of substrates for multilayer X-ray optics using small-angle X-ray reflectometry, atomic-force, and interference microscopy
Title:
Particulars of studying the roughness of substrates for multilayer X-ray optics using small-angle X-ray reflectometry, atomic-force, and interference microscopy
Author:
Barysheva, M. M. Vainer, Yu. A. Gribkov, B. A. Zorina, M. V. Pestov, A. E. Rogachev, D. N. Salashchenko, N. N. Chkhalo, N. I.
Appeared in:
Bulletin of the Russian Academy of Sciences. Physics