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Journal description
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Details for article 29 of 38 found articles
| Title: |
Prospects of developing multibeam systems for low-voltage electron lithography |
| Author: |
Fat’yanova, G. I. Vasichev, B. N. |
| Appeared in: |
Bulletin of the Russian Academy of Sciences. Physics |
| Paging: | Volume 71 (2007) nr. 10 pages 1463-1467 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Allerton Press, Inc., New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 38 found articles
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