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  Advancements in MEMS materials and processing technology
 
 
Title: Advancements in MEMS materials and processing technology
Author: Olivas, John D.
Bolin, Stephen
Appeared in: JOM
Paging: Volume 50 () nr. 1 pages 38-43
Year: 1998-04-16
Contents:
Publisher: Springer-Verlag, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 20 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands