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Experimental and simulation study of charge transport mechanism in HfTiOx high-k gate dielectric on SiGe heterolayers |
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Titel: |
Experimental and simulation study of charge transport mechanism in HfTiOx high-k gate dielectric on SiGe heterolayers |
Auteur: |
Maiti, P P Dash, Ajit Guhathakurata, S Das, S BAG, Atanu Dash, T P Ahmad, G MAITI, C K Mallik, S |
Verschenen in: |
Bulletin of materials science |
Paginering: |
Jaargang 45 () nr. 1 pagina's xx |
Jaar: |
2022-02-20 |
Inhoud: |
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Uitgever: |
Indian Academy of Sciences, Bangalore |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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