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Journal description
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Details for article 14 of 17 found articles
| Title: |
SiO2-like film deposited by plasma polymerization of HMDSO + O2 using repetitive high voltage pulses |
| Author: |
Chaiwong, C. Boonrang, A. |
| Appeared in: |
JCT Research |
| Paging: | Volume 17 () nr. 6 pages 1497-1503 |
| Year: |
2020-07-15 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 17 found articles
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