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Details for article 13 of 26 found articles
| Title: |
Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD |
| Author: |
Kirchheim, Dennis Wilski, Stefan Jaritz, Montgomery Mitschker, Felix Oberberg, Moritz Trieschmann, Jan Banko, Lars Brochhagen, Markus Schreckenberg, Rabea Hopmann, Christian Böke, Marc Benedikt, Jan Arcos, Teresa de los Grundmeier, Guido Grochla, Dario Ludwig, Alfred Mussenbrock, Thomas Brinkmann, Ralf Peter Awakowicz, Peter Dahlmann, Rainer |
| Appeared in: |
JCT Research |
| Paging: | Volume 16 (2018) nr. 2 pages 573-583 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 26 found articles
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