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                                       Details for article 5 of 42 found articles
 
 
  Controlled Growth of Conductive AlN Thin Films by Plasma-Assisted Reactive Evaporation
 
 
Title: Controlled Growth of Conductive AlN Thin Films by Plasma-Assisted Reactive Evaporation
Author: Alizadeh, M.
Goh, B. T.
Rahman, S. A.
Appeared in: Metallurgical and materials transactions. A, Physical metallurgy and materials science
Paging: Volume 48 (2017) nr. 7 pages 3461-3469
Year: 2017
Contents:
Publisher: Springer US, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 42 found articles
 
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